Microscope Superview W1
Description Key Features Software: XtremeVision 3D Application Applications Cases Lens Spec General Spec Videos
SuperView W1 – 3D Optical Surface Profilometer
White Light Interferometry | Nano 3D Surface Form & Roughness
The CHOTEST SuperView W1 is a state-of-the-art optical surface profiler designed for high-precision 3D surface analysis at the nanometric level. Using white light interferometry, it provides accurate, repeatable, and non-contact measurements of surface form, roughness, and step height — ideal for R&D and quality control in semiconductor, optics, micro-electronics, and materials industries.
Key Features
High-Resolution 3D Measurement
Advanced white-light interferometry for ultra-precise topography and roughness mapping.
Multiple Interference Lenses
Interchangeable lenses (2.5× to 100×) for both smooth and coarse surface measurements.
Vacuum Object Table
Stable and vibration-free measurement for delicate wafers and micro-components.
Air-Bearing Isolation System
Built-in air suspension ensures vibration isolation for ultra-stable performance.
Smart Leveling & Vibration Isolation
Sonic vibration isolation and adjustable leveling system to enhance accuracy.
Ergonomic Joystick Control
Intuitive joystick for easy X/Y/Z movement and focus adjustment.
Software: XtremeVision 3D
The integrated XtremeVision 3D software combines:
3D image scanning & analysis
Automated measurement
Intelligent noise filtering
Hybrid scanning (white light interferometry + confocal)
It allows automatic feature recognition and step height measurement with repeatability as fine as 0.005μm and step accuracy of 0.08%.
point-line distance, angle, radius, etc.
Application
micro-nano materials, micro-electro-mechanical system.
Application Cases
Measurement and analysis for various products, components and materials`surface form and profile characteristics, such as flatness, roughness, waviness, appearance, surface defect, abrasion, corrosion, gap,hole, stage, curvature, deformation, etc.
Lens Specification
Note:
*1 Use EPSl mode to measure Sa 0.2nm silicon wafer in the laboratory environment; Single stripe, 80um filter for full field of view.
*2 Measure Sa 0.2nm silicon wafer in a laboratory environment according to the ISO 25178.
*3 Measure standard 5um steps height block in a laboratory environment according to the ISO 1060-1:2009.
*4 When the software noise evaluation is 4nm≤3σ≤10nm, the Roughness RMS repeatability is revised down to 0.015nm, the Step height measurement accuracy is revised down to 0.7%, and the step height measurement repeatability is revised down to 0.12%;When the software noise evaluation is 3σ>10nm, the environment does not meet the requirement for usage of the equipment, and need to change the site.
Surface Profile measurement by Chotest 3D optical profilometer W1
The CHOTEST W1 nano-profilometer microscope is a high-precision instrument designed for surface measurement and analysis at the nanoscale. It utilizes advanced optical technology, including various magnification interference lenses and a vacuum object table, to ensure accurate and stable measurements, even on delicate or uneven surfaces. The system also incorporates features like an air-bearing isolation system and sonic vibration isolation to eliminate external interference, alongside a convenient joystick for precise control, making it ideal for applications in fields requiring detailed surface characterization.
Nano Surface Profile measurement by Chotest 3D - optical profilometer W1
General presentation
Metal Scraps surface roughness inspection by Chotest W1 Optical 3D Surface profilometer
Metal Scraps surface roughness inspection by Chotest W1 Optical 3D Surface profilometer