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Microscope VT6000

3D Optical Surface Profilometer
Confocal Microscope
VT6100 - VT6200 - VT6300

Description Key Features Software: XtremeVision 3D Application Applications Cases Lens Spec General Spec Videos


VT6000 series – Confocal Microscope

White Light Interferometry | Nano 3D Surface Form & Roughness

Confocal Microscope VT6000 is dedicated for micro-nano level measurement of various precision
components and material surfaces. It can measure the surface of various objects from smooth to
rough, low reflectivity to high reflectivity, and the roughness, flatness, micro-geometric profile,
curvature, etc.
Total more than 300 kinds of 2D and 3D parameters as per four major domestic and

foreign standards ISO/ASME/EUR/GBT are provided as evaluation standards.


Key Features


High precision and high repeatability

  • ​​Based on the rotating confocal optical system, ​combined with high stability structural design ​​and excellent 3D reconstruction algorithm, the ​measurement system is jointly composed to ​ensure the high measurement accuracy of the ​​instrument.
  • The unique shock isolation design can reduce the vibration noise of the bottom surface, the instrument ​is stable and reliable in most environments, and has ​good measurement repeatability.

All-in-one operation of measurement analysis software

  • The measurement and analysis are operated on the same interface without switching, and the measurement data is automatically counted, realizing the function of rapid batch measurement.

  • The visualization window is convenient for users to observe the scanning process in real time.

  • Combined with the automatic measurement function of the custom analysis template, the multi-region measurement and analysis can be automatically completed.

  • Five functional modules of geometric analysis, roughness analysis, structural analysis, frequency analysis and functional analysis.

  • One-key analysis, multi-file analysis, free combination analysis items are saved as analysis templates, one-key analysis of batch samples, and data analysis and statistical chart functions are provided.

  • More than 300 kinds of 2D and 3D parameters can be measured according to ISO/ASME/EUR/GBT.

Precision joystick

  • The joystick integrated with the displacement adjustment functions in the three directions of X, Y, and Z can quickly complete the pre-measurement works such as stage translation and 2-way focusing etc.

Double anti-collision protection measures

  • In addition to the software ZSTOP setting the lower limit of the Z-direction displacement for anti-collision protection, a mechanical and electronic sensor is designed on the Z-axis. When the lens touches the surface of the sample, the instrument automatically enters an emergency stop state to protect the instrument to the greatest extent and reduce the risk of human operation.

Software: XtremeVision 3D

The integrated XtremeVision 3D software combines:

  • 3D image scanning & analysis

  • Automated measurement

  • Intelligent noise filtering

  • Hybrid scanning (white light interferometry + confocal)

It allows automatic feature recognition and step height measurement with repeatability as fine as 0.005μm and step accuracy of 0.08%.

The second-generation self-developed microscopic 3D measurement software integrates four modular functions: Image scanning, 3D analysis, Image measurement, and Automated measurement.

It can perfectly adapt to all microscopic 3D machine models of CHOTEST W series & VT series & WT series, and can independently identify the type of model. 
Especially, the software can automatically switch scanning modes between white light interferometry and confocal microscopy on 2-in-1 Hybrid 3D Optical Profilometer.

Xtremevision Pro has transplanted the successful experience of CHOTEST in the field of image flash measurement, which can automatically match and measure XY plane dimensions such as

point-line distance, angle, radius, etc.

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Application

It is used for measurement and analysis of surface roughness and profile of precision components
from industries of semi-conductor, 3C Electronics, ultraprecise machining, optical machining,

micro-nano materials, micro-electro-mechanical system.


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Application Cases

Measurement and analysis for various products, components and materials`surface form and profile characteristics, such as flatness, roughness, waviness, appearance, surface defect, abrasion, corrosion, gap,hole, stage, curvature, deformation.

V-shaped groove - Trench - Pyramid shape

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Lens Specification


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Videos

VT6000 confocal MicroscopeMeasures Solar cell Grid Size



VT6000 confocal Microscope Measures Solar cell Grid Size

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For other models and more details, please refer to our brochure Request for brochure