Microscope Superview WX100
Description Key Features Software: XtremeVision 3D Application Applications Cases Lens Spec General Spec Videos

SuperView WX100 – 3D Optical Surface Profilometer
White Light Interferometry | Nano 3D Surface Form & Roughness
The WX100 is a compact, stand-alone WLI probe designed for integration into production lines or custom measurement stations. It brings the power of nanoscale 3D profiling and roughness measurement directly to your manufacturing process for in-line inspection. Featuring motorized tilt and a comprehensive SDK, it is the perfect component for automating quality control and developing tailored metrology solutions.
Key Features
Measurement function: it can realize high precision Z scanning of sample surface and obtain 3D image.
Analysis function: It can obtain 2D and 3D data such as surface roughness, micro-nano-level contour size, etc.
Programming function: Support pre-configured data processing and analysis tool steps, one-click to complete the whole process from measurement to analysis.
Batch analysis: Data processing and analysis templates can be customized according to the customer demands, and one-click batch analysis can be realized for the same type of parameter data.

Software: XtremeVision 3D
The integrated XtremeVision 3D software combines:
3D image scanning & analysis
Automated measurement
Intelligent noise filtering
Hybrid scanning (white light interferometry + confocal)
It allows automatic feature recognition and step height measurement with repeatability as fine as 0.005μm and step accuracy of 0.08%.


Application
- Semiconductor, polished silicon wafer, thin silicon wafer, wafer IC
- 3C electronics, sapphire glass roughness, metal shell mold defects, glass screen height difference

Application Cases
Measurement and analysis for various products, components and materials`surface form and profile characteristics, such as flatness, roughness, waviness, appearance, surface defect, abrasion, corrosion, gap,hole, stage, curvature, deformation, etc.
Lens Specification

Super WX100 AU full automation optical 3D profile measurement system
Super WX100 AU full automation optical 3D profile measurement system
